Process for production of polycrystalline silicon

Details Process for production of polycrystalline silicon Process for production of polycrystalline silicon

1971-09-24

1976-01-20

Stern, Edward

Chemistry of inorganic compounds

Silicon or compound thereof

Elemental silicon

423342, C01B 3300, C01B 3302, C01B 3308

Patent

active

039339858

ABSTRACT:
There is disclosed a process for the hydrogen reduction of silicon tetrachloride to produce trichlorosilane. In accordance with the process, hydrogen and silicon tetrachloride vapors are passed through a reaction chamber at relatively high flow rates with approximately 50 mole percent silicon tetrachloride in the mixture. The reaction vessel is held at a temperature of between 900.degree. and 1200.degree. C. This process is a part of an overall system for the production of polycrystalline silicon for the semiconductor industry.

REFERENCES:
patent: 2595620 (1952-05-01), Wagner et al.
patent: 2768061 (1956-10-01), Cook et al.
patent: 2904404 (1959-09-01), Ellis, Jr.
patent: 2943918 (1960-07-01), Pauls
patent: 3325314 (1967-06-01), Allegretti
patent: 3488152 (1970-01-01), Kuehl
patent: 3565590 (1971-02-01), Bracken
J. W. Mellor's "A Comprehensive Treatise on Inorganic and Theoretical Chem.," Vol. 6, 1925, p. 964. Longmans, Green & Co., N.Y.
Handbook of Chemistry and Physics, 43rd Ed., 1961, p. 2321. The Chemical Rubber Publishing Co., Cleveland, Ohio.
Hurd, "Journal Of The American Chemical Society," Vol. 67, pp. 1545-1548 (1945).

Affiliated with

Also associated with

Rating

Process for production of polycrystalline silicon does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for production of polycrystalline silicon, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for production of polycrystalline silicon will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1698549