Chemistry of inorganic compounds – Silicon or compound thereof – Elemental silicon
Patent
1971-09-24
1976-01-20
Stern, Edward
Chemistry of inorganic compounds
Silicon or compound thereof
Elemental silicon
423342, C01B 3300, C01B 3302, C01B 3308
Patent
active
039339858
ABSTRACT:
There is disclosed a process for the hydrogen reduction of silicon tetrachloride to produce trichlorosilane. In accordance with the process, hydrogen and silicon tetrachloride vapors are passed through a reaction chamber at relatively high flow rates with approximately 50 mole percent silicon tetrachloride in the mixture. The reaction vessel is held at a temperature of between 900.degree. and 1200.degree. C. This process is a part of an overall system for the production of polycrystalline silicon for the semiconductor industry.
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J. W. Mellor's "A Comprehensive Treatise on Inorganic and Theoretical Chem.," Vol. 6, 1925, p. 964. Longmans, Green & Co., N.Y.
Handbook of Chemistry and Physics, 43rd Ed., 1961, p. 2321. The Chemical Rubber Publishing Co., Cleveland, Ohio.
Hurd, "Journal Of The American Chemical Society," Vol. 67, pp. 1545-1548 (1945).
Motorola Inc.
Olsen Henry T.
Stern Edward
Weiss Harry M.
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