Process for production of ceramic member having fine throughhole

Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor

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156252, 156253, B32B 3126

Patent

active

057282447

ABSTRACT:
A process for producing a ceramic member having fine throughholes, includes a step of preparing a first green sheet for a thin ceramic plate, a step of forming, in the first green sheet, a plurality of fine throughholes so that the hole-to-hole distance after sintering becomes 70 .mu.m or less, a step of preparing a second green sheet for a ceramic substrate, a step of forming at least one window in the second green sheet, a step of laminating the first green sheet having a plurality of fine throughholes, on the second green sheet having at least one window so that the plurality of fine throughholes correspond to the at least one window, to form a unitary laminate, and a step of sintering the laminate to produce a unitarily sintered material as a ceramic member having fine throughholes. Alternatively, the throughholes can be formed after the first and second sheets are laminated.

REFERENCES:
patent: 4695854 (1987-09-01), Cruz-Uribe
patent: 4710250 (1987-12-01), Kojima et al.
patent: 5376856 (1994-12-01), Takeuchi et al.
patent: 5517076 (1996-05-01), Takeuchi et al.
patent: 5545461 (1996-08-01), Takeuchi et al.

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