Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1976-12-16
1978-02-07
Weisstuch, Aaron
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
338308, C23C 1500
Patent
active
040725936
ABSTRACT:
There is provided a process of producing a resistance element for a resistance thermometer consisting of a thin platinum layer on an insulating solid as a carrier, by sputtering the platinum layer on the solid in a krypton-oxygen or xenon-oxygen mixture.
REFERENCES:
patent: 3645783 (1972-02-01), Rupert et al.
patent: 3833410 (1974-09-01), Ang
patent: 3845443 (1974-10-01), Fisher
W. D. Westwood et al. "Formation of PtO Films by Reactive Sputtering, " J. Appl. Phys. 45, pp. 2313-2315 (1974).
C. D. Bennewitz et al. "Structural & Electrical Properties of Films Sputtered from a Pt Cathode in Argon-Oxygen Mixtures," J. Appl. Phys., 46, pp. 558-567 (1975).
Diehl Walter
Koehler Wolfgang
Deutsche Gold- und Silber-Scheideanstalt vormals Roessler
Weisstuch Aaron
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