Process for producing α-substituted acrylic acid esters

Organic compounds -- part of the class 532-570 series – Organic compounds – Carboxylic acid esters

Reexamination Certificate

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C560S223000

Reexamination Certificate

active

07067691

ABSTRACT:
A process for producing an α-substituted acrylic acid ester represented by the formula [1],wherein each of R1and R2is independently a hydrogen atom, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, fluoromethyl group, difluoromethyl group, trifluoromethyl group, or perfluoroethyl group, includes reacting an α-substituted acrylic acid anhydride represented by the formula [7], with 1,1-bis(trifluoromethyl)-1,3-diol represented by the formula [2].

REFERENCES:
patent: 3438946 (1969-04-01), Lichstein et al.
patent: 3662071 (1972-05-01), Langkammerer
patent: 4859793 (1989-08-01), Hurtel
patent: 6784312 (2004-08-01), Miyazawa et al.
patent: 2003/0224283 (2003-12-01), Allen et al.
patent: 2003-040840 (2003-02-01), None
Takashi Chiba et al., “157 nm Resist Materials: A Progress Report”, Journal of Photopolymer Science and Technology, vol. 13, No. 4, 2000, p. 657.

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