Process for producing vibrator for piezoelectric motor

Details Process for producing vibrator for piezoelectric motor Process for producing vibrator for piezoelectric motor

1993-04-19

1996-02-27

Powell, William

Etching a substrate: processes

Adhesive or autogenous bonding of two or more...

216 41, 216 99, B44C 122

Patent

active

054945437

ABSTRACT:
A vibrator for a piezoelectric motor is produced by forming an elastic material into a predetermined shape, forming a piezoelectric material on the shaped elastic material for polarization and for driving, forming an electrode for polarization on the piezoelectric material, forming an electrode for driving on the surface of the electrode for polarization or on the piezoelectric material after stripping the electrode for polarization, and etching the elastic material into a predetermined shape has an elastic body and to remove the elastic body from a base. Instead of forming the piezoelectric material on the shaped elastic material for polarization and for driving, an electrode both for polarization and for driving can be formed on one face of the shaped elastic material, and the piezoelectric material can be formed on that electrode.

REFERENCES:
patent: 4764244 (1988-08-01), Chitty et al.

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