Process for producing vacuum deposition films

Coating processes – Coating by vapor – gas – or smoke – Metal coating

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4272552, 4272553, 427294, 427296, C23C 1100, C23C 1300

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043776078

ABSTRACT:
In a process for producing vacuum deposition films which comprises providing a vacuum deposition film composed of an alloy or an intermetallic compound of two or more components having different vapor pressures at a specified temperature on a base, the improvement which comprises charging the component having the lower vapor pressure at said temperature to an evaporation source in a vacuum evaporation chamber in such an amount that the evaporation amount thereof per unit time does not substantially vary, and carrying out vacuum evaporation while continuously feeding a component having a higher vapor pressure at said temperature into said evaporation source in an amount corresponding to the evaporation amount thereof per unit time.

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patent: 3363998 (1968-01-01), Keister et al.
patent: 3415672 (1968-12-01), Levinstein et al.
patent: 3520716 (1970-07-01), Okamoto et al.
patent: 3911177 (1975-10-01), Humbert et al.
patent: 4016305 (1977-04-01), Wakabayashi et al.
Light, "Evaporating Materials with Elements Having Dissimilar Vapor Pressures," IBM Technical Disclosure Bulletin, vol. 12, No. 1, Jun. 1969.
Burkhart et al, "Process for Evaporating Alloy Films," IBM Technical Disclosure Bulletin, vol. 20, No. 1, Jun. 1977.

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