Process for producing thin films of oxide ceramic

Details Process for producing thin films of oxide ceramic Process for producing thin films of oxide ceramic

1998-07-14

2000-03-14

King, Roy V.

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

42725532, 42725528, 4271263, 427576, 427595, C23C 1640, B05D 306

Patent

active

060370025

ABSTRACT:
A process for producing thin films of oxide ceramic by deposition of metal oxides on a surface. An accelerator is added to initiate oxidation of organometallic precursors.

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patent: 5686151 (1997-11-01), Imai et al.
International Application WO 93/13243 (Buchanan et al.), dated Jul. 8, 1993.
Japanese Patent Abstract No. 06166597 (Takuo), dated Jun. 14, 1994.
Japanese Patent No 7-273216, dated Oct. 20, 1995.
Takuma Katayama et al.: "Photo-MOCVD of PbTiO3 thin films", Journal of Crystal Growth, 115(1991) Dec. pp. 289-293.
Weyten et al, Physica C 270, pp. 207-215, 1996.
International Publication No. WO 96/08587 (Kirlin et al.), dated Mar. 21, 1996.

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