Process for producing thin films of inorganic oxides of controll

Details Process for producing thin films of inorganic oxides of controll Process for producing thin films of inorganic oxides of controll

1993-11-12

1995-02-14

King, Roy V.

Superconductor technology: apparatus, material, process

Processes of producing or treating high temperature...

Coating

505474, 505475, 505476, 505730, 505731, 505732, 427 62, 427596, 4271263, 427314, 20419224, 20419215, C23C 1400, B05D 512

Patent

active

053896068

ABSTRACT:
An in-situ process for preparing thin films which contain relatively volatile and involatile oxides is disclosed, in particular, crystalline thin films of oxides of conductors, superconductors or ferroelectric materials, wherein separate sources of the relatively volatile and involatile oxides during depositon of the thin film are employed.

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