Process for producing thin-film transistors on an insulating sub

Details Process for producing thin-film transistors on an insulating sub Process for producing thin-film transistors on an insulating sub

1982-12-20

1984-01-17

Powell, William A.

Coating processes

Electrical product produced

Condenser or capacitor

156653, 156656, 156657, 1566591, 427 88, 427 93, 430313, 430317, 430318, B05D 512, B05D 306, C23F 102, B44C 122

Patent

active

044264070

ABSTRACT:
Process for the production of thin-film transistors on an insulating substrate, wherein it comprises the following stages:

REFERENCES:
patent: 4169746 (1979-10-01), Ipri et al.
patent: 4263058 (1981-04-01), Brown et al.
patent: 4276688 (1981-07-01), Hsu
patent: 4332837 (1982-06-01), Peyre-Lavigne
patent: 4356622 (1982-11-01), Widmann
patent: 4378628 (1983-04-01), Levinstein et al.
Hydrogenation of Transistors Fabricated in Polycrystalline-Silicon Films, IEE Electron Device Letters, vol. EdL-1, No. 8, Aug., 1980, pp. 159-161.
Electronics Letters, Jul. 5, 1979, vol. 15, No. 14, pp. 435-437.

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