Process for producing thin film resistor

Details Process for producing thin film resistor Process for producing thin film resistor

1977-12-14

1979-07-17

Tufariello, T. M.

Chemistry: electrical and wave energy

Processes and products

29620, 29625, 204 37R, 204 38A, 427101, C25D 502, C25D 1102, H01C 1706

Patent

active

041614313

ABSTRACT:
A thin film resistor is produced by forming a film of tantalum pentoxide on part of a pattern of tantalum nitride, simultaneously forming an electroconductor and an electrode on other part, where no film of tantalum pentoxide is formed, by means of a metal cheaper than gold, and heating the pattern in an inert gas atmosphere.

REFERENCES:
patent: 3387952 (1968-06-01), La Chapelle
patent: 3423260 (1969-01-01), Heath et al.
patent: 3489656 (1970-01-01), Balde
patent: 3544287 (1970-01-01), Sharp
patent: 3607679 (1971-09-01), Melroy
patent: 3786557 (1974-01-01), Bodway

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