Process for producing superconducting thin film

Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k

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427 38, 427 42, 427 62, 4272553, B05D 512, B05D 306, C23C 1600

Patent

active

048617504

ABSTRACT:
A process for producing a superconducting thin film of the present invention comprises: supplying onto a substrate a group IIa metal and/or an oxide thereof, a group IIIa metal and/or an oxide thereof, and copper and/or an oxide thereof; and irradiating the substrate with an oxygen neutral beam, to thereby form a thin film of IIa-IIIa-Cu oxide.

REFERENCES:
patent: 4634600 (1987-01-01), Shimizu et al.
Martin et al, Applied Optics, vol. 22, No. 1, Jan. 1983, pp. 178-184.

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