Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state
Reexamination Certificate
2006-01-24
2006-01-24
Hiteshew, Felisa (Department: 1722)
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
C117S217000, C117S218000, C117S222000
Reexamination Certificate
active
06989059
ABSTRACT:
In a production method for producing a compound semiconductor single crystal by LEC method using a crystal growth apparatus with a double crucible structure, it was made to grow up a crystal by covering the second crucible with a plate-like member having a pass-through slot for being capable of introducing a crystal pulling-up shaft having a seed crystal holding part at a tip into the second crucible and creating a state where an atmosphere within the second crucible scarcely changes (a semi-sealed structure).
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Arakawa Atsutoshi
Asahi Toshiaki
Sato Kenji
Yabe Takayuki
Birch & Stewart Kolasch & Birch, LLP
Hiteshew Felisa
Nikko Materials Co., Ltd.
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