Process for producing silicon on insulator structure having...

Details Process for producing silicon on insulator structure having... Process for producing silicon on insulator structure having...

2006-07-04

2006-07-04

Mai, Anh D. (Department: 2814)

Semiconductor device manufacturing: process

Gettering of substrate

By implanting or irradiating

C438S480000

Reexamination Certificate

active

07071080

ABSTRACT:
The present invention is directed to a process for producing a silicon on insulator (SOI) structure having intrinsic gettering, wherein a silicon substrate is subjected to an ideal precipitating wafer heat treatment which enables the substrate, during the heat treatment cycles of essentially any arbitrary electronic device manufacturing process to form an ideal, non-uniform depth distribution of oxygen precipitates, and wherein a dielectric layer is formed beneath the surface of the wafer by implanting oxygen or nitrogen ions, or molecular oxygen, beneath the surface and annealing the wafer. Additionally, the silicon wafer may initially include an epitaxial layer, or an epitaxial layer may be deposited on the substrate during the process of the present invention.

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