Process for producing silicon

Details Process for producing silicon Process for producing silicon

2005-01-06

2009-12-15

Bos, Steven (Department: 1793)

Chemistry of inorganic compounds

Silicon or compound thereof

Elemental silicon

C423S348000, C423S350000

Reexamination Certificate

active

07632478

ABSTRACT:
The present invention relates to a process for producing silicon by thermal decomposition of a gaseous mixture comprising monosilane, monochlorosilane and, if desired, further chlorosilanes, e.g. dichlorosilane.

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