Process for producing semiconductor substrate by heating to flat

Details Process for producing semiconductor substrate by heating to flat Process for producing semiconductor substrate by heating to flat

1995-03-13

1999-02-09

Chaudhari, Chandra

Semiconductor device manufacturing: process

Bonding of plural semiconductor substrates

Thinning of semiconductor substrate

438479, H01L 21306

Patent

active

058693874

ABSTRACT:
A process for producing a semiconductor substrate comprises heat-treating a substrate having a monocrystal thereon in a reducing atmosphere.

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