Process for producing semiconductor devices

Details Process for producing semiconductor devices Process for producing semiconductor devices

1989-12-21

1992-04-28

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 67, H01L 2176

Patent

active

051087839

ABSTRACT:
A process for producing a semiconductor device including the steps of:

REFERENCES:
patent: 4140558 (1979-02-01), Murphy et al.
patent: 4466180 (1984-08-01), Sollof
patent: 4569701 (1986-02-01), Oh
patent: 4711017 (1987-12-01), Lammert
"A Variable-Size Shallow Trench Isolation (STI) Technology with Diffused Sidewall Doping for Submicron CMOS", CH 2528-8/88, 92-95 IDEM 88, IEEE (1988).
"New Effects of Trench Isolated Transistor using Side-Wall Gates", CH 2515-5/87, 736-739-IDEM 87, IEEE (May 1987).

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