Process for producing semiconductor device

Details Process for producing semiconductor device Process for producing semiconductor device

1992-08-25

1994-03-29

Wilczewski, Mary

Fishing, trapping, and vermin destroying

437 44, 437 52, 437241, H01L 21336

Patent

active

052984460

ABSTRACT:
A process for producing a semiconductor device comprising the steps of:

REFERENCES:
patent: 4818714 (1989-04-01), Haskell
patent: 4843023 (1989-06-01), Chiu et al.
patent: 5015595 (1991-05-01), Wollesen
patent: 5021848 (1991-06-01), Chiu
patent: 5045486 (1991-09-01), Chittipeddi et al.
patent: 5073514 (1991-12-01), Ito et al.
Pfiester, "LDD MOSFET's Using Disposable Sidewall Spacer Technology", IEEE Electron Device Letters, vol. 9, No. 4, 1988, pp. 189-192.
Japanese Journal of Applied Physics; vol. 27, No. 12, Dec., 1988, pp. 2209-2217.

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