Process for producing polyimide optical waveguide

Details Process for producing polyimide optical waveguide Process for producing polyimide optical waveguide

2006-04-25

2006-04-25

Ullah, Akm Enayet (Department: 2874)

Optical waveguides

Planar optical waveguide

C385S131000, C385S143000, C385S145000, C430S321000, C430S018000

Reexamination Certificate

active

07035516

ABSTRACT:
A process for producing a polyimide optical waveguide, including: (a) forming an undercladding layer on a substrate, (b) forming a photosensitive polyimide resin precursor composition layer on the undercladding layer, (c) irradiating the photosensitive polyimide resin precursor composition layer, excepting a region corresponding to a core pattern, with a UV light through a mask, followed by heating (d) removing a UV-unexposed area of the layer by development, (e) heating a UV-exposed area of the layer to imidize the UV-exposed area, thereby forming a cladding layer having a desired pattern, (f) coating the region corresponding to the core pattern and a surface of the cladding layer with a polyamic acid that forms a polyimide resin having a higher refraction index than the polyimide resin of the cladding layer, and imidizing the polyamic acid by heating to form a core layer, and (g) forming an overcladding layer on the core layer.

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Search Report dated May 25, 2004.

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