Process for producing polycrystalline silicon

Details Process for producing polycrystalline silicon Process for producing polycrystalline silicon

1979-08-27

1982-03-09

Cooper, Jack

Coating processes

Particles, flakes, or granules coated or encapsulated

Solid encapsulation process utilizing an emulsion or...

423342, 423349, 423DIG16, 427 86, 427215, C01B 3302, C01B 33107

Patent

active

043189423

ABSTRACT:
An economical, low temperature, closed loop, thermal decomposition process is provided for producing a controllable mixture of heterogeneously and homogeneously nucleated ultrahigh purity polycrystalline silicon suitable for use in the manufacture of semiconductor devices and photovoltaic solar cells. The process manipulates the equilibrium expressed by the chemical reaction ##STR1##

REFERENCES:
patent: 2595620 (1952-05-01), Wagner et al.
patent: 2925357 (1960-02-01), Kothen
patent: 3012861 (1961-12-01), Ling
patent: 3050365 (1962-08-01), Nelson et al.
patent: 4092446 (1978-05-01), Padovani et al.
patent: 4117094 (1978-09-01), Blocher et al.
patent: 4207360 (1980-06-01), Padovani

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