Process for producing photoconductive member and apparatus for p

Details Process for producing photoconductive member and apparatus for p Process for producing photoconductive member and apparatus for p

1992-04-23

1993-11-02

Beck, Shrive

Coating apparatus

Gas or vapor deposition

Multizone chamber

118 64, 118 58, 118 66, 118 72, 118724, 118725, 118 50, C23C 1400

Patent

active

052580750

ABSTRACT:
A process for producing a photoconductive member by introducing starting gases while heating a support to form a thin film having photoconductivity thereon in sequential steps comprises introducing a support into a chamber, heating the support to a desired temperature under reduced pressure, reacting the substrate with starting gases to form a thin film having photoconductivity thereon, cooling the substrate having a thin film and removing product support out of the chamber, these steps being carried out in sequential chamber throughout the steps, and an apparatus for producing the same.

REFERENCES:
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patent: 4015558 (1977-04-01), Small et al.
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patent: 4313254 (1982-02-01), Feldman et al.
patent: 4392451 (1983-07-01), Mickelsen et al.
patent: 4461783 (1984-07-01), Yamazaki
patent: 4485125 (1984-11-01), Izu et al.
patent: 4492181 (1985-01-01), Ovshinsky
patent: 4666734 (1987-05-01), Kamiya

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