Process for producing perfluorocarbons and use thereof

Details Process for producing perfluorocarbons and use thereof Process for producing perfluorocarbons and use thereof

2006-06-20

2006-06-20

Price, Elvis O. (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Halogen containing

C570S164000, C570S165000, C570S166000, C570S167000, C570S168000, C570S169000

Reexamination Certificate

active

07064240

ABSTRACT:
The process for producing perfluorocarbons according to the present invention is characterized in that in the production of a perfluorocarbon by contacting an organic compound with a fluorine gas, the organic compound is contacted with the fluorine gas at a temperature of from 200 to 500° C. and the content of an oxygen gas within the reaction system is controlled to 2% by volume or less based on the gas components in the reaction starting material, whereby a perfluorocarbon reduced in the content of impurities is produced. According to the process for producing perfluorocarbons of the present invention, high-purity perfluorocarbons extremely suppressed in the production of impurities such as oxygen-containing compound can be obtained. The perfluorocarbons obtained by the production process of the present invention contain substantially no oxygen-containing compound and therefore, can be effectively used as an etching or cleaning gas for use in the process for producing a semiconductor device.

REFERENCES:
patent: 4158023 (1979-06-01), von Halasz
patent: 4377715 (1983-03-01), Nychka et al.
patent: 6136214 (2000-10-01), Mori et al.
patent: 1161952 (1997-10-01), None
patent: 2 311 522 (1997-10-01), None
patent: 9-241186 (1997-09-01), None
patent: WO 96/09271 (1996-03-01), None

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