Process for producing organiclight-emitting display device

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element

Reexamination Certificate

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C438S022000, C438S048000, C438S700000, C438S723000, C438S738000

Reexamination Certificate

active

07964421

ABSTRACT:
A position displacement between a substrate and a mask which is caused when the substrate and the mask are brought into close contact with each other is suppressed by a magnetic force. In a step of forming an organic compound layer (organic EL element film) included in an organic light-emitting display device on the substrate (2) through the mask (3) by vapor deposition, the substrate (2) is aligned with the mask (3) and then the substrate (2) is pressed to the mask (3) by a plurality of pressing members (5) to perform temporary fixation. While the position displacement between the substrate (2) and the mask (3) is suppressed by the temporary fixation, the substrate (2) is brought into close contact with the mask (3) by magnets (6). A plurality of positions of the substrate (2) which has aligned are temporarily fixed by the plurality of pressing members (5), respectively, so that high-precision patterning can be performed to prevent a deviation of the organic EL element film from an anode.

REFERENCES:
patent: 2005/0130356 (2005-06-01), Yotsuya
patent: 2005/0153472 (2005-07-01), Yotsuya
patent: 2004-169061 (2004-06-01), None
patent: 2005-158571 (2005-06-01), None
patent: 2005-206939 (2005-08-01), None
patent: 2005-248249 (2005-09-01), None
patent: 2005-251498 (2005-09-01), None
patent: 2005-256101 (2005-09-01), None
patent: 10-2005-0051551 (2005-06-01), None
patent: 10-2005-0067084 (2005-06-01), None
Machine Translation of JP 2005-248249, Sep. 15, 2005.
Partial Translation of JP 2005-248249, Sep. 15, 2005.
Korean Office Action issued in the counterpart application No. 10-2009-7006078 dated Oct. 26, 2010—3 pages.

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