Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2000-04-13
2003-06-03
Lund, Jeffrie R (Department: 1763)
Coating apparatus
Gas or vapor deposition
With treating means
C118S7230VE
Reexamination Certificate
active
06571728
ABSTRACT:
BACKGROUND OF THE INVENTION
(1) Field of the Invention
This invention relates to a process and an apparatus for producing an organic electroluminescent display, more specifically, to a process and an apparatus for producing a metal electrode thereof.
(2) Description of the Related Art
As shown in
FIG. 4
, an organic electroluminescent display is constructed in such a manner that a transparent electrode
11
made of indium tin oxide (hereinafter, ITO), a layer of organic electroluminescent material
12
and a metal electrode
13
are laminated in order on a transparent board
10
.
The metal electrode
13
is usually formed by electron beam evaporation method.
As shown in
FIG. 5
, a transparent board
10
, on which a transparent electrode
11
and a layer of organic electroluminescent material
12
are formed, is set up in a vacuum chamber that is not shown in the figure, then electron beams
3
A generated at an electron beam generator
3
are irradiated onto a metal electrode material
1
that is placed in a crucible
2
to form a metal electrode
13
, thereby melting the metal electrode material
1
to generate the metal vapor and then, the generated metal vapor is evaporated onto the layer of organic electroluminescent material
12
, thereby the metal electrode
13
is formed.
In such a case that the metal electrode
13
is formed by the above-mentioned electron beam evaporation method, as shown in
FIG. 5
, when the electron beams
3
A are irradiated onto the metal electrode material
1
, secondary electrons
4
are emitted from the metal electrode material
1
and collide against the layer of organic electroluminescent material
12
.
The secondary electrons
4
collide against the layer of organic electroluminescent material
12
, causing damage to the layer of organic electroluminescent material
12
and deteriorating a luminous efficiency thereof.
SUMMARY OF THE INVENTION
It is therefore an objective of the present invention to solve the above problem and to provide an apparatus for producing a metal electrode of organic electroluminescent display without deteriorating a luminous efficiency of a layer of organic electroluminescent material and a process for producing such a metal electrode.
In order to attain the above objective, a first aspect of the present invention is to provide an apparatus for producing an organic electroluminescent display, in which a metal electrode is formed by electron beam evaporation method, comprising a device for preventing secondary electrons generated at an evaporation source from reaching a display board.
Preferably, the device in the first aspect of the present invention forms a magnetic field in parallel with the display board between the display board and the evaporation source, whereby the magnetic field is formed in a direction crossing at right angles with electron beams irradiated onto the evaporation source.
The device to form a magnetic field is electrically insulated.
Further, the device in the first aspect of the present invention is a lattice-shaped electrode formed in parallel with the display board between the display board and the evaporation source, and a negative voltage is applied to the lattice-shaped electrode.
A second aspect of the present invention is to provide a process for producing an organic electroluminescent display, in which a metal electrode is formed by electron beam evaporation method, comprising the steps of: forming a magnetic field in parallel with a display board between the display board and an evaporation source; and evaporating a metal electrode material of the evaporation source onto the display board by electron beam evaporation method.
A third aspect of the present invention is to provide a process for producing an organic electroluminescent display, in which a metal electrode is formed by electron beam evaporation method, comprising the steps of: forming an electric field in a direction crossing at right angles with a display board between the display board and an evaporation source; and evaporating a metal electrode material of the evaporation source onto the display board by electron beam evaporation method.
REFERENCES:
patent: 3931490 (1976-01-01), Grothe et al.
patent: 4483725 (1984-11-01), Chang
patent: 5656141 (1997-08-01), Betz et al.
patent: 5785763 (1998-07-01), Onda et al.
patent: 62-27748 (1987-02-01), None
patent: 62-185875 (1987-08-01), None
patent: 5-205689 (1993-08-01), None
patent: 6-330292 (1994-11-01), None
patent: 7-211641 (1995-08-01), None
Lund Jeffrie R
Sughrue & Mion, PLLC
Tohoku Pioneer Corporation
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