Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Liquid phase epitaxial growth
Patent
1995-03-22
1996-05-21
Kunemund, Robert
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Liquid phase epitaxial growth
117 65, 117 66, 117 67, 117948, C30B 1912
Patent
active
055179428
ABSTRACT:
A process for producing optoelectric articles, in which an optoelectric single crystal film is formed on an optoelectric single crystal substrate, is disclosed. The optoelectric single crystal substrate is exposed to a liquid phase in a supercooling state of a melt including a solute and a melting medium, and the optoelectric single crystal film is formed by a liquid phase epitaxial process. In this case, a viscosity of the liquid phase is set to 75%.about.95% preferably 75%.about.90% with respect to a viscosity at which a degree of supercooling of the liquid phase is zero.
REFERENCES:
patent: 5209917 (1993-05-01), Ohno et al.
Miyazawa, Shinataro et al., "Optical Waveguide of LiNbO.sub.3 Thin Film Grown by Liquid Phase Epitaxy", Applied Physics Letters, vol. 26, No. 1, pp. 8-10, Jan. 1, 1975.
Baudrant, A. et al., "Liquid Phase Epitaxy of LiNbO.sub.3 Thin Films for Integrted Optics", Mat. Res. Bull. vol. 10, pp. 1373-1377, Pergamon Press, USA, 1975.
Tamada, Hitoshi et al., "LiNbO.sub.3 Thin-Film Optical Waveguide Grown by Liquid Phase Epitaxy and its Application to Second Harmonic Generation", J. Appl. Phys. 70, pp. 2536-2541, Sep. 1, 1991.
Yamada, Atsuo et al. "Liquid Phase Epitaxial Growth of LiNbO.sub.3 Thin Film Using Li.sub.2 O-B.sub.2 O.sub.3 Flux System", Journal of Crystal Growth 132, pp. 48-60, Elsevier Science Publishers, North-Holland, 1993.
Journal of Crystal Growth, "Direct Measurement of Temperature Dependence of Lattice Mismatches Between LPE-Grown Li(Nb,Ta)O3 Film and LiTaO3 Structure", Sugh et al, pp. 607-614.
Patent Abstracts of Japan, vol. 17, No. 475 (C-1103).
Fukuda Tsuguo
Imaeda Minoru
Kawaguchi Tatsuo
Okano Yasunori
Kunemund Robert
NGK Insulators Ltd.
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