Optical waveguides – Planar optical waveguide – Thin film optical waveguide
Reexamination Certificate
2007-06-26
2007-06-26
Pak, Sung (Department: 2874)
Optical waveguides
Planar optical waveguide
Thin film optical waveguide
C385S014000
Reexamination Certificate
active
11006674
ABSTRACT:
The invention provides a process for producing an optical waveguide, which comprises the steps of: forming a substrate adhesion layer on a surface of a substrate from a layer-forming material containing a coupling agent; forming an undercladding layer on the substrate adhesion layer; and forming a core layer having a predetermined pattern on the undercladding layer through a wet process with a developing solution.
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Mochizuki Amane
Mune Kazunori
Naitou Ryusuke
Tagawa Kenichi
Nitto Denko Corporation
Pak Sung
Petkovsek Daniel
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