Process for producing nitrogen trifluoride

Details Process for producing nitrogen trifluoride Process for producing nitrogen trifluoride

2006-03-28

2006-03-28

Langel, Wayne A. (Department: 1754)

Chemistry of inorganic compounds

Nitrogen or compound thereof

Binary compound

C423S470000

Reexamination Certificate

active

07018598

ABSTRACT:
F2gas is reacted with NH3gas in a gaseous phase at 80° C. or less in the presence of a diluting gas to produce NF3. Thus, NF3is produced with good safety, efficiency and profitability.

REFERENCES:
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patent: 4091081 (1978-05-01), Woytek et al.
patent: 4543242 (1985-09-01), Aramaki et al.
patent: 5637285 (1997-06-01), Coronell et al.
patent: 6183713 (2001-02-01), Tokunaga et al.
patent: 02255512 (1990-10-01), None
patent: 02255513 (1990-10-01), None
patent: 03170307 (1991-07-01), None
patent: 05105411 (1993-04-01), None
Abstract of Japanese 355116624A, Sep. 8, 1980.
Abstract of European 000345354A1, Dec. 13, 1989.

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