Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate
2006-07-04
2006-07-04
Smith, Matthew (Department: 2823)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
C257S432000, C257S444000, C438S022000, C438S032000, C438S048000
Reexamination Certificate
active
07071521
ABSTRACT:
A process produces microelectromechanical components from a substrate that has a first side and a second side which is substantially opposite from the first side, and at least the first side has at least one microelectromechanical element. The process includes the step of providing at least one conductive passage into the substrate, connecting the first side to the second side, and securing at least one support to the first side of the substrate, with the at least one electrically conductive passage uncovered by thinning the substrate material with the mechanical stability being ensured by the support.
REFERENCES:
patent: 2002/0135069 (2002-09-01), Wood et al.
Bieck Florian
Leib Jürgen
Schott AG
Smith Matthew
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