Process for producing microelectromechanical components and...

Details Process for producing microelectromechanical components and... Process for producing microelectromechanical components and...

2005-05-17

2005-05-17

Lee, Hsien-Ming (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C257S432000, C257S444000, C438S022000, C438S032000, C438S048000, C438S055000

Reexamination Certificate

active

06894358

ABSTRACT:
A microelectromechanical component is produced from a substrate having a first side and a second side which is substantially opposite from the first side, at least the first side having at least one microelectromechanical element, by introducing at least one conductive passage is introduced into the substrate, connecting the first side to the second side.

REFERENCES:
patent: 5766979 (1998-06-01), Budnaitis
patent: 6338284 (2002-01-01), Najafi et al.
patent: 6384353 (2002-05-01), Huang et al.
patent: 6433411 (2002-08-01), Degani et al.
patent: 6461888 (2002-10-01), Sridhar et al.
patent: 6580858 (2003-06-01), Chen et al.
patent: 20020135069 (2002-09-01), Wood et al.

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