Process for producing micro Fresnel lens

Details Process for producing micro Fresnel lens Process for producing micro Fresnel lens

1984-11-09

1986-09-02

Corbin, John K.

35016216, 350320, G02B 308

Patent

active

046092595

ABSTRACT:
A process for producing a micro Fresnel lens comprises the following steps: moving either a substrate coated with a resist layer for providing the micro Fresnel lens or a source of actinic radiation such as electron beam for exposing the resist layer relative to each other in a fixed direction; scanning linearly the resist coat with the actinic radiation in a direction perpendicular to the direction of the relative movement; during the scanning operation, performing exposure to the actinic radiation or interrupting or overlapping the application of the actinic radiation so as to form a latent image in an area corresponding to the grooved surface of the micro Fresnel lens within a predetermined width; repeating the above procedures in a direction perpendicular to that of the relative movement of the substrate and the source of actinic radiation; and developing the exposed resist layer to provide a micro Fresnel lens having the desired grooved surface.

REFERENCES:
patent: 3948660 (1976-04-01), Deml et al.
Optics Communications, vol. 6, No. 2 (Oct. 1972) by J. J. Clair.
Optics Communications, vol. 5, No. 4 (Jul. 1972) by L. d'Auria, J. P. Huignard, A. M. Roy and E. Spitz.

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