Process for producing low-loss embedded waveguide

Details Process for producing low-loss embedded waveguide Process for producing low-loss embedded waveguide

1990-11-06

1992-11-03

Lindsay, Robert L.

Glass manufacturing

Processes

With chemically reactive treatment of glass preform

65 6051, 65117, C03C 2100

Patent

active

051603608

ABSTRACT:
A process for producing a low-loss embedded waveguide is disclosed, which comprises: a first ion exchange step in which a glass substrate containing a monovalent ion and capable of undergoing ion exchange is subjected to thermal ion exchange through an ion exchange-control film provided on the substrate and having a predetermined waveguide pattern formed therein, by immersing the substrate in a first molten salt containing a first monovalent ion capable of changing the refractive index of the substrate; an etching step in which the ion exchange-control film is removed form the substrate by etching; an electric field-applying annealing step in which an electric field is applied to the substrate at substantially right angles to the substrate at a temperature near the temperature at which the first ion exchange step was conducted, provided that the side of the substrate which had the ion exchange-control film is used as a positive potential side; and a second ion exchange step in which the resulting glass substrate is subjected to thermal ion exchange by immersing the substrate in a second molten salt containing a second monovalent ion capable of changing the refractive index of the substrate in a manner contrary to the first monovalent ion.

REFERENCES:
patent: 3836348 (1974-09-01), Sumimoto et al.
patent: 4765702 (1988-08-01), Dohan et al.
patent: 4913717 (1990-04-01), Cooper
patent: 4933262 (1990-06-01), Beguin
Albert et al., "Full Modeling of Field Assisted Ion Exchange", Applied Optics, 29(18), pp. 2798-2804.
Blahut et al., "Gradient Index Planar Glass Waveguides", Zesz. Nauk. Politech. Slask., Mat.-Fiz., 60, pp. 31-40.
Seki et al., "Two-Step Purely Thermal Ion-Exchange Technique", Electronic Letters, vol. 24, pp. 1258-1259, 1988.
Alferness, "Waveguide Electrooptic Modulators", IEEE Transactions on Microwave Theory, vol. MTT-30, No. 8, Aug. 1988, pp. 1121-1137.
Yamada et al., "Optical Fibre Coupling to High-Silica Channel Waveguide", Electronic Letters, vol. 20, No. 8, pp. 313-314, 1984.

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