Process for producing ITO sintered body

Details Process for producing ITO sintered body Process for producing ITO sintered body

1997-12-11

1999-11-09

Fiorilla, Christopher A.

Plastic and nonmetallic article shaping or treating: processes

Outside of mold sintering or vitrifying of shaped inorganic...

Producing metal oxide containing product

264614, 241 5, C04B 3332, B02C 1906

Patent

active

059808152

ABSTRACT:
An indium oxide-tin oxide (ITO) sintered body is prepared by mixing a tin oxide powder with an indium oxide powder, molding the resulting mixed powder to obtain a green body, and sintering the resulting green body. At least the tin oxide powder has beforehand been pulverized by colliding tin oxide particles with each other or against a collision substance in gas streams. At least 90 wt % of the pulverized tin oxide powder is preferably particles having a particle size of 0.2-10 .mu.m. A jet mill can be used for the pulverization. The ITO sintered body has a density as high as 7.08 g/cm.sup.3 or more and, during sputtering, is free from nodule formation and is inhibited from generating particles.

REFERENCES:
patent: 5094787 (1992-03-01), Nakajima et al.
patent: 5401701 (1995-03-01), Ogawa et al.
patent: 5433901 (1995-07-01), Rancoule et al.
patent: 5700419 (1997-12-01), Matsunaga et al.
Modern Ceramic Engineering, Richerson, pp. 394-395, 1992.
Principles of Ceramics Processing, Reed, pp. 314-319, 1995.
Kato et al "New Ceramics Powder Handbook" pp. 182-185 published Jul. 25, 1985 Note--translation of only one paragraph on p. 183 of document (2.2.1) .

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