Process for producing improved membranes

Details Process for producing improved membranes Process for producing improved membranes

2007-04-10

2007-04-10

Nguyen, Dung Van (Department: 3723)

Abrading

Abrading process

With critical temperature modification or control of work or...

C451S007000

Reexamination Certificate

active

10544010

ABSTRACT:
The present invention relates generally to the field of chemical/mechanical polishing of substrates. In particular the invention relates to methods of producing improved membranes for use in chemical/mechanical polishing systems. The present invention provides a method of improving the properties of a flexible membrane for use in chemical/mechanical polishing, the method including subjecting the membrane to elevated temperatures.

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patent: 2003 142438 (2003-05-01), None
patent: 2003 297784 (2003-10-01), None

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