Process for producing hydrogenated amorphous silicon film

Details Process for producing hydrogenated amorphous silicon film Process for producing hydrogenated amorphous silicon film

1988-09-28

1989-09-12

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 2, 437 5, 20419212, 20419215, 20419225, 357 2, H01L 2100, H01L 2102, H01L 3100, H01L 3118

Patent

active

048660060

ABSTRACT:
A process for production of a hydrogenated amorphous silicon film of a silicon compound containing at least one element selected from the group consisting of hydrogen and halogens and having a photosensitivity of not less than 0.1 erg/cm.sup.2 at 780 nm, which comprises

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