Specialized metallurgical processes – compositions for use therei – Processes – Electrothermic processes
Patent
1998-07-16
2000-03-14
Speer, Timothy
Specialized metallurgical processes, compositions for use therei
Processes
Electrothermic processes
75361, 75367, 148678, C21B 1110, B22F 100, C22F 114
Patent
active
060367415
ABSTRACT:
A process comprises forming ruthenium tetroxide by blowing ozone-containing gas into crude ruthenium powder while hypochlorous acid is being added to the powder, allowing a hydrochloric acid solution to absorb the ruthenium tetroxide, evaporating the solution to dryness, and roasting the RuOCl.sub.3 crystals thus obtained in a hydrogen atmosphere. Thus a high-purity ruthenium material for thin film deposition, typically sputtering targey, is obtained which contains less than 1 ppm each of alkali metal elements, less than 1 ppm each of alkaline earth metal elements, less than 1 ppm each of transition metal elements, less than 10 ppb each of radioactive elements, a total of less than 500 ppm of carbon and gaseous ingredient elements, the material having a purity of ruthenium of at least 99.995% excluding the gaseous ingredient elements.
Shindo Yuichiro
Suzuki Tsuneo
Japan Energy Corporation
Speer Timothy
Stem Stephen
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