Process for producing high-purity organic phosphine

Details Process for producing high-purity organic phosphine Process for producing high-purity organic phosphine

1992-04-28

1994-02-08

Cintins, Marianne M.

Organic compounds -- part of the class 532-570 series

Organic compounds

Phosphorus containing

568 17, C07F 902

Patent

active

052849775

ABSTRACT:
A high-purity organic phosphine is obtained by washing organic phosphine or an organic solvent solution thereof with water, an alkaline aqueous solution or an acidic aqueous solution, whereby impurities, particularly, silicon compounds, 2-methoxy ethanol, and organic halides, contained in organic phosphine can be removed, so that such high-purity organic phosphine may be used as a raw material for high-performance compound semiconductor thin film with Groups III and V elements of the Periodic Table.

REFERENCES:
patent: 4113783 (1978-09-01), Malpass et al.
patent: 5041676 (1991-08-01), Hofmann
"High-Purity InP Layer Grown by Metalorganic Chemical Vapor Deposition Using Tertiarybutylphosphine", T. Imori et al., Appl. Phys. Lett., vol. 59, No. 22, Nov.25, 1991, pp. 2862-2864.
C. H. Chen et al., "MOVPE Growth of InP Using Isobutylphosphine and tert-Butylphosphine", Journal of Crystal Growth, 77 (1986), pp. 11-18.

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