Process for producing fluorine-containing, polymerizable...

Details Process for producing fluorine-containing, polymerizable... Process for producing fluorine-containing, polymerizable...

2005-09-13

2005-09-13

Keys, Rosalynd (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Oxygen containing

C568S660000, C568S661000, C568S662000, C568S663000, C568S811000, C568S812000, C568S813000, C568S814000, C556S009000, C556S012000

Reexamination Certificate

active

06943271

ABSTRACT:
A fluorine-containing styrene monomer of the formula (2) is produced by a first, second or third process. The first process includes (a) reacting a compound of the formula (1) with a compound of the formula (3), in the presence of a metal catalyst; (b) reacting the product of the step (a) with a base; and (c) reacting the product of the step (b) with hydrogen, in the presence of a metal catalyst and a phosphine or amine, thereby producing the target styrene monomer. The second process includes reacting a compound of the formula (1) with a compound of the formula (12), in the presence of a metal catalyst, thereby producing the target styrene monomer. The third process includes reacting a compound of the formula (13) with a compound of the formula (14) or (15), in the presence of a base, thereby producing the target styrene monomer.

REFERENCES:
patent: 3179640 (1965-04-01), Middleton
patent: 5352742 (1994-10-01), Han et al.
patent: 42 07 261 (1992-03-01), None
Fender, N. et al. “Characterization of New Aromatic Polymers for 157 nm Photoresist Applications”,Proceedings of SPIE-The International Society for Optical Engineering(2001), vol. 4345, pp. 417-427.

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