Coating processes – With post-treatment of coating or coating material – Heating or drying
Reexamination Certificate
2006-08-15
2006-08-15
Zimmer, Marc S. (Department: 1712)
Coating processes
With post-treatment of coating or coating material
Heating or drying
C106S287130, C106S287140, C106S287160, C427S058000, C427S422000, C427S443200, C521S077000, C524S379000, C524S386000, C524S356000, C524S366000, C556S479000
Reexamination Certificate
active
07090896
ABSTRACT:
A process for producing dielectric layers with low dielectric constants by thermal treatment of a sol-gel product of a multifunctional carbosilane, corresponding layers, and their use in the production of electronic components, are described.
REFERENCES:
patent: 5677410 (1997-10-01), Maget et al.
patent: 5906859 (1999-05-01), Bremmer et al.
patent: 6005131 (1999-12-01), Jentsch et al.
patent: 6042994 (2000-03-01), Yang et al.
patent: 6043330 (2000-03-01), Hacker et al.
patent: 6054206 (2000-04-01), Mountsier
patent: 6068884 (2000-05-01), Rose et al.
patent: 6136939 (2000-10-01), Mager et al.
patent: 6143855 (2000-11-01), Hacker et al.
patent: 6225238 (2001-05-01), Wu
patent: 6395649 (2001-05-01), Wu
patent: 6413638 (2002-07-01), Mager et al.
patent: 2001/0055891 (2001-12-01), Ko et al.
patent: 2002/0064965 (2002-05-01), Wu
patent: 2003/0198895 (2003-10-01), Toma et al.
patent: 2004/0180222 (2004-09-01), Ogihara et al.
patent: 2005/0003681 (2005-01-01), Lyu et al.
Gaiser Detlef
Kirchmeyer Stephan
Kraus Harald
Merker Udo
Gil Joseph C.
H.C. Starck GmbH
Zimmer Marc S.
LandOfFree
Process for producing dielectric layers by using... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Process for producing dielectric layers by using..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for producing dielectric layers by using... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3643916