Process for producing diamond electron emission element and...

Details Process for producing diamond electron emission element and... Process for producing diamond electron emission element and...

2008-01-29

2008-01-29

Williams, Joseph (Department: 2879)

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

C313S336000, C313S351000

Reexamination Certificate

active

10555296

ABSTRACT:
A method for production includes a step for forming concave molds on a surface of a substrate and a step for growing a diamond heteroepitaxially on the substrate in an atmosphere containing a doping material. The crystal structure of the slope of the concave molds of the substrate can have the cubic system crystal orientation (111), and the doping material is phosphorous. Further, the substrate is Si, and the slope of the molds can be the Si(111) face. The diamond electron emission device contains projection parts on the surface thereof, where a slope of the projection parts1contains a diamond (111) face, and flat parts2, which are not the projection parts, contain face orientations other than (100) face or (110) face and grain boundaries.

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W. B. Choi, et al., Field Emission from Diamond Coated Molybdenum Field Emitters, J. Vac. Sci. Technol. B 14(3), May/Jun. 1996, American Vacuum Society, pp. 2050-2055.
PCT International Preliminary Report on Patentability for PCT/JP2004/014671 issued on Jun. 20, 2006.

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