Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound
Patent
1988-10-19
1990-05-29
Doll, John
Chemistry of inorganic compounds
Silicon or compound thereof
Binary compound
C01B 21036, C01B 3306
Patent
active
049294326
ABSTRACT:
A process for producing crystalline silicon nitride powder by a gas phase reaction of ammonia (NH.sub.3) and silane (SiH.sub.4) with a molar ratio of 7:1 or above at a temperature of 900.degree. C. or above and the heating the as-reacted amorphous powders at a temperature of 1350.degree. C. to 1800.degree. C. to convert the powders to a highly pure and submicron crystalline silicon nitride powder comprising at least a 90% .alpha.-Si.sub.3 N.sub.4 phase.
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Advanced Materials Research Laboratory, Toyo Soda Manufacturing Co., Ltd. Ayase, Kanagawa, Japan, K. Kasal et al. "Synthesis of Si.sub.3 N.sub.4 Powder by Thermal Decomposition of Si(NH).sub.2 and Sintering Properties", pp. 1278-1288.
Journal of Materials Science 10(1975)-Letters, "Synthesis of the Alpha Form of Silicon Nitride from Silica", pp. 1243-1246.
Cuomo Lori F.
Doll John
O'Brien Cornelius F.
Union Carbide Corporation
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