Process for producing crystalline ceric oxide particles and abra

Details Process for producing crystalline ceric oxide particles and abra Process for producing crystalline ceric oxide particles and abra

1997-07-24

1999-10-05

Jones, Deborah

Semiconductor device manufacturing: process

Chemical etching

Combined with the removal of material by nonchemical means

438691, 438692, 423263, 252302, 51309, B24D 334

Patent

active

059623438

ABSTRACT:
According to the present invention, a process is provided for producing crystalline ceric oxide particles having a particle diameter of 0.005 to 5 .mu.m, which comprises the steps of reacting a cerium (III) salt with an alkaline substance in an (OH)/(Ce.sup.3+) molar ratio of 3 to 30 in an aqueous medium in an inert gas atmosphere to produce a suspension of cerium (III) hydroxide, and blowing oxygen or a gas containing oxygen into the suspension at a temperature of 10 to 95.degree. C. and at an atmospheric pressure.

REFERENCES:
patent: 4606847 (1986-08-01), Woodhead
patent: 4647401 (1987-03-01), Gradeff et al.
patent: 5543126 (1996-08-01), Ota et al.
patent: 5662874 (1997-09-01), David
Chemical Abstract vol. 108, No. 115183c "Method of Cerium Oxidation" (1988). (no month).
Sanderson, R.T. Inorganic Chemistry. Hirokawa Publishing Co., Apr. 1982, pp. 346-349.

Affiliated with

Also associated with

Rating

Process for producing crystalline ceric oxide particles and abra does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for producing crystalline ceric oxide particles and abra, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for producing crystalline ceric oxide particles and abra will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1170948