Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube
Patent
1994-07-06
1997-07-22
Rosasco, S.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Screen other than for cathode-ray tube
430 3, 396564, G03F 900
Patent
active
056502516
ABSTRACT:
A color filter is produced through the steps of: forming a layer of a color filter material including a colorant dispersed in a photosensitive resin on a substrate; and pre-baking, exposing and developing the color filter material layer to leave a color filter pattern on the substrate. In the developing step, a developer liquid is applied in the form of a curtain onto the exposed color filter material layer on the substrate, the substrate is allowed to stand in a substantially still state and then the substrate is supplied with an ultrasonic wave projected perpendicularly to the substrate while being in contact with the developer liquid. The ultrasonic wave is preferably uniformized by at least two rotating reflection or diffusion plates before it is projected onto the substrate. As a result, the color filter pattern can be developed with little development irregularity even on a large-size substrate.
REFERENCES:
patent: 4652106 (1987-03-01), Jurgensen et al.
patent: 5294505 (1994-03-01), Kamon
Ishiwata Kazuya
Nishida Naoya
Unno Akira
Watanabe Yasuyuki
Canon Kabushiki Kaisha
Rosasco S.
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