Process for producing closely spaced conductive lines for integr

Details Process for producing closely spaced conductive lines for integr Process for producing closely spaced conductive lines for integr

1994-07-07

1995-01-03

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 52, 437193, 437195, 437 48, H01L 21265

Patent

active

053786467

ABSTRACT:
A process of fabricating a non-volatile read only memory device (ROM) wherein the conductive word lines have desirable very narrow widths and are closely spaced. The invention provides a process for forming word lines with a smaller width and line pitch than is possible with conventional processes. A first set of word lines is formed. Next, a second set of word lines is formed in between the first word lines using oxide spacers to define the second word lines.

REFERENCES:
patent: 4502914 (1985-03-01), Trumpp et al.
patent: 4839305 (1989-06-01), Brighton
patent: 5126290 (1992-06-01), Lowrey et al.
patent: 5236853 (1993-08-01), Hsue
patent: 5264386 (1993-11-01), Yang
patent: 5290723 (1994-03-01), Tani et al.
patent: 5306657 (1994-04-01), Yang
patent: 5318921 (1994-06-01), Hsue et al.

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