Etching a substrate: processes – Forming or treating optical article
Patent
1995-07-03
1997-08-12
Powell, William
Etching a substrate: processes
Forming or treating optical article
216 34, 216 67, 216 80, B44C 122, C03C 1500
Patent
active
056561814
ABSTRACT:
The process for the preparation of a waveguide buried in a glass substrate according to the invention consists of the following stages:
REFERENCES:
patent: 5032220 (1991-07-01), Yamamoto et al.
patent: 5480764 (1996-01-01), Gal et al.
Biasse Beatrice
Pigeon Florent
Commissariat a l''Energie Atomique
Powell William
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