Coating processes – Coating by vapor – gas – or smoke
Patent
1995-03-21
1996-12-31
Beck, Shrive
Coating processes
Coating by vapor, gas, or smoke
427249, 427255, 4272552, 4272557, 117 88, 117 89, C23C 1630
Patent
active
055892230
ABSTRACT:
A cermet cutting tool, and process for producing the same, comprising a substrate formed from titanium carbo-nitride based cermet, and a hard coating layer of average thickness 0.5.about.20 .mu.m, formed onto the surface of the cermet substrate comprising a lower layer formed from at least one layer of a compound selected from the group consisting of titanium carbide (TiC), titanium nitride (TiN), titanium carbo-nitride (TiCN), titanium carbo-oxide (TiCO) and titanium carbo-oxi-nitride (TiCNO), and aluminum oxide (Al.sub.2 O.sub.3). Additionally, at least one of the layers comprising the hard coating layer is a titanium carbo-nitride layer, and at least one layer of this titanium carbo-nitride layer comprises a longitudinal growth crystal structure, and a further layer comprises a granular crystal structure. In the method of fabrication, chemical vapor deposition is performed using a reaction gas composed of 1.about.5% of TiCl.sub.4, 0.1.about.1% of CH.sub.3 CN, 0.about.25% of N.sub.2 with the remaining portion being composed of H.sub.2, under a reaction temperature of 800.degree..about.900.degree. C. and a reaction pressure of 30.about.200 Torr.
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Kubel, E., "New CVD-coatings for carbide inserts", Adv. Hard Mater. Prod., Conf. Proc. (1988) pp. 27/1-27/9.
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Nakamura Seiichirou
Odani Niro
Osada Akira
Tanaka Tetsuya
Yoshimura Hironori
Beck Shrive
Meeks Timothy H.
Mitsubishi Material Corp.
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