Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound
Patent
1989-11-28
1993-01-12
Group, Karl
Chemistry of inorganic compounds
Silicon or compound thereof
Binary compound
423345, 423346, 423406, 423409, 423440, G01B 33025
Patent
active
051788470
ABSTRACT:
The invention relates to a process for the production of silicon ceramic whiskers and silicon ceramic powder from silicon fluoride and ammonia or a hydrocarbon, at an elevated temperature. According to the invention, the hydrocarbon or ammonia (4) is decomposed separately at a high temperature into reactive carbon or nitrogen and hydrogen, whereafter the carbon or nitrogen radical thus obtained is further in a gas phase contacted with reactive silicon formed therein from silicon difluoride, in order to deposit finely-divided silicon nitride or silicon carbide out from the gas phase.
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Hayha
Judin Vesa-Pekka
Koukkari Pertti
Green Anthony J.
Group Karl
Kemira Oy
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