Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent
1996-08-20
1999-11-02
Meeks, Timothy
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
427377, 427378, 4273831, C23C 1640
Patent
active
059766247
ABSTRACT:
The formation of an electrically conductive phase in an dielectric or ferroelectric composed of a bismuth compound is inhibited. Described is a process for producing a bismuth compound, which comprises introducing a gas of starting materials in an atmosphere under a pressure of 0.01 to 50 torr, depositing a precursor of a bismuth compound on a substrate, and thermally treating it in an oxidizing atmosphere.
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Ami Takaaki
Hironaka Katsuyuki
Ikeda Yuji
Meeks Timothy
Sony Corporation
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