Process for producing bis(alkyl-cyclopentadienyl)ruthenium compl

Details Process for producing bis(alkyl-cyclopentadienyl)ruthenium compl Process for producing bis(alkyl-cyclopentadienyl)ruthenium compl

1999-03-08

1999-12-14

Nazario-Gonzalez, Porfirio

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

4272481, C07F 1500, C07F 1700

Patent

active

060020369

ABSTRACT:
To provide Ru compounds which are in the form of a liquid at room temperature to be used in forming Ru and RuO.sub.2 films for electrodes in semiconductor devices by the CVD method and a process for producing these compounds.
Because of being a liquid at room temperature and having a sufficient vapor ressure at about 100.degree. C., bis(ethylcyclopentadienyl)ruthenium or bis(isopropylcyclopentadienyl)ruthenium can be quantitatively supplied via gas bubbling or with the use of a liquid mass flow controller as a feedstock in the CVD method and thermally decomposed on a substrate at 600.degree. C. in a hydrogen atmosphere to give pure Ru films. These compounds can be obtained at a high yield by reacting respectively ruthenium trichloride hydrate and ethylcyclopentadiene or isopropylcyclopentadiene with a zinc powder in an alcohol solvent at -30 to 0.degree. C.

REFERENCES:
patent: 2912449 (1959-11-01), Sweeney
patent: 3306917 (1967-02-01), Shapiro et al.
patent: 4992305 (1991-02-01), Erbil

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