Process for producing bi-polar charge coupled devices by ion-imp

Details Process for producing bi-polar charge coupled devices by ion-imp Process for producing bi-polar charge coupled devices by ion-imp

1979-08-13

1980-11-04

Rutledge, L. Dewayne

Metal treatment

Compositions

Heat treating

148187, 357 24, 7 91, H01L 2978, H01L 21265

Patent

active

042318106

ABSTRACT:
A charge coupled device (CCD-device) for sensors and memory is produced so as to have a bipolar structure, with the doped regions and zones thereof being produced by ion implantation whereby a greater structure density is attained along with a reduction in the transfer coefficient .epsilon..

REFERENCES:
patent: 3739240 (1973-06-01), Krambeck
patent: 3930893 (1976-01-01), Tschon
patent: 4024563 (1977-05-01), Tasch, Jr.
patent: 4032952 (1977-06-01), Ohba et al.
patent: 4047215 (1977-09-01), Frye et al.
Boyle et al., Bell Syst. Techn. J. 49, (1970), 587.
Kleefstra, Micro-Electronics, vol. 7, No. 2, (1975) 68.

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