Process for producing an aluminum nitride sintered body

Details Process for producing an aluminum nitride sintered body Process for producing an aluminum nitride sintered body

2008-08-13

2009-06-30

Group, Karl E (Department: 1793)

Compositions: ceramic

Ceramic compositions

Refractory

C264S662000, C264S666000, C264S673000, C264S676000

Reexamination Certificate

active

07553788

ABSTRACT:
An aluminum nitride sintered body having resistance to plasma gas and high thermal conduction and having excellent optical properties. The aluminum nitride sintered body of the present invention is characterized in that the proportion of positrons which are annihilated within a period of 180 ps (picoseconds) in the aluminum nitride crystal, as determined in the defect analysis using a positron annihilation method, is not less than 90%, and the sintered body preferably has a thermal conductivity of not less than 200 W/mK.

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