Process for producing aluminum nitride and aluminum nitride

Details Process for producing aluminum nitride and aluminum nitride Process for producing aluminum nitride and aluminum nitride

2006-01-17

2006-01-17

Langel, Wayne A. (Department: 1754)

Chemistry of inorganic compounds

Nitrogen or compound thereof

Binary compound

Reexamination Certificate

active

06986875

ABSTRACT:
A process for producing aluminum nitride includes a step of holding an aluminum powder in a nitrogen atmosphere whose nitrogen gas pressure falls in a range of from 105 to 300 kPa, thereby developing a nitriding reaction at a temperature of from 500 to 1,000° C., wherein a reaction controller gas, controlling the development of the nitriding reaction, is supplied into a reactor chamber in which the aluminum powder is accommodated. In the production process, the reaction controller gas is included in the nitrogen atmosphere in the development of the nitriding reaction. Accordingly, the development of the nitriding reaction is controlled so that it is possible to develop the nitriding reaction at a lower temperature. As a result, it is possible to produce an aluminum nitride powder whose particle diameters are fine.

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